The Micro Nano Fabrication Laboratory is a campus-wide resource for thin film processing for a wide variety of disciplines, including:
- Photonics
- Biophysics
- Electronics
- Chemistry
- Materials Science
The Micro Nano Lab is located in The Thomas J. Watson Laboratory of Applied Physics [Campus Map] - Building 95
User Information
Reservations
Users must complete training. Contact Alireza Ghaffari for training.
Once trained, users must register to reserve a machine. Please register here.
Users are charged $300 per month, per user. If you reserve a machine and must cancel, please be sure to remove your reservation from the calendar, otherwise you will be charged a $50 fee.
Walk-ins must update the reservation calendar using the computer in the lab
Contact Information
Alireza Ghaffari
Member of the Professional Staff; Lab Administrator for the Micro/Nano Center
ghaffaricaltech.edu
176 Watson Laboratory
Mail Code 128-95
(626) 395-3984
Safety
All users are required to attend Laboratory Safety Orientation with the Caltech Safety Office prior to using the equipment in the Micro Nano Lab. Click here for safety information.
Equipment
- Field Emission Scanning Electron Microscope
- Mask Aligner
- Profilometer
- Atomic Force Microscope
- Optical Microscope
- Thin Film Metal Evaporator
- Oxygen Plasma System